Browsing by Author "Liu, Y."
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Item Enhancing Interconnect Reliability and Performance by Converting Tantalum to 2D Layered Tantalum Sulfide at Low Temperature(Wiley-VCH Verlag, 2019-06-11) Lo, C. -L; Catalano, Massimo; Khosravi, Ava; Ge, W.; Ji, Y.; Zemlyanov, D. Y.; Wang, Luhua; Addou, Rafik; Liu, Y.; Wallace, Robert M.; Kim, Moon J.; Chen, Z.; 0000-0001-5566-4806 (Wallace, RM); Catalano, Massimo; Khosravi, Ava; Wang, Luhua; Addou, Rafik; Wallace, Robert M.; Kim, Moon J.The interconnect half-pitch size will reach ≈20 nm in the coming sub-5 nm technology node. Meanwhile, the TaN/Ta (barrier/liner) bilayer stack has to be >4 nm to ensure acceptable liner and diffusion barrier properties. Since TaN/Ta occupy a significant portion of the interconnect cross-section and they are much more resistive than Cu, the effective conductance of an ultrascaled interconnect will be compromised by the thick bilayer. Therefore, 2D layered materials have been explored as diffusion barrier alternatives. However, many of the proposed 2D barriers are prepared at too high temperatures to be compatible with the back-end-of-line (BEOL) technology. In addition, as important as the diffusion barrier properties, the liner properties of 2D materials must be evaluated, which has not yet been pursued. Here, a 2D layered tantalum sulfide (TaSₓ) with ≈1.5 nm thickness is developed to replace the conventional TaN/Ta bilayer. The TaSx ultrathin film is industry-friendly, BEOL-compatible, and can be directly prepared on dielectrics. The results show superior barrier/liner properties of TaSₓ compared to the TaN/Ta bilayer. This single-stack material, serving as both a liner and a barrier, will enable continued scaling of interconnects beyond 5 nm node. ©2019 WILEY-VCH Verlag GmbH & Co. KGaA, WeinheimItem Polystyrene-Coated Interdigitated Microelectrode Array to Detect Free Chlorine Towards IoT Applications(Japan Society for Analytical Chemistry, 2018-12-28) Liu, Y.; Liang, Yuchen; Xue, L.; Liu, R.; Tao, J.; Zhou, D.; Zeng, X.; Hu, Wenchuang (Walter); Liang, Yuchen; Hu, Wenchuang (Walter)We apply interdigitated microelectrode array (IDA) sensors for water quality monitoring. IDA sensors with an ion-sensitive coating show higher sensitivity of about 600 mV with the hypochlorite ion concentration increasing from 0 to 10 ppm more than the traditional sensing method. The response mechanism and selectivity have been studied. Several material components that affect the sensing process were explored. Coupling agents and plasticizer were introduced into the coating material to improve the coating material quality and its adhesion to the electrodes. The stability/repeatability and linearity have been significantly improved. ©2019, The Japan Society for Analytical Chemistry.Item Transforming Entity-Relationship Diagrams to Relational Schemas Using a Graph Grammar Formalism(Institute of Electrical and Electronics Engineers Inc., 2018-12) Liu, Y.; Zeng, X.; Zhang, Kang; Zou, Y.; 65983012 (Zhang, K); Zhang, KangAs a formal tool extended from string grammars, graph grammars provide an intuitive yet formal way to define and transform various visual languages. This paper proposes an approach to transform Entity-Relationship diagrams (E-R diagrams) to relational schemas using a graph grammar formalism. We briefly introduce the edge-based graph grammar, on which a set of productions is designed for specifying the syntax of E-R diagrams. The set of productions can be used to verify the validity of any given E-R diagram. In addition, a procedure of transforming a given E-R diagram to a relational schema is added into the parsing process. Via the graph grammar, the automatic transformation is rigorous yet concise. We finally provide an example E-R diagram for a business management system and its transformation into relational schemas to demonstrate the specification, transformation and analyzing the power of our approach. ©2018 IEEE.