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    • A Crystalline Oxide Passivation for Al₂O₃/AlGaN/GaN 

      Qin, Xiaoye; Dong, Hong; Kim, Jiyoung; Wallace, Robert M.
      In situ X-ray photoelectron spectroscopy and low energy electron diffraction are performed to study the formation of a crystalline oxide on the AlGaN surface. The oxidation of the AlGaN surface is prepared by annealing and ...