There is a trend toward the miniaturization of devices for a multitude of industries (microelectronic, energy harvesting/collecting, sensing, etc.) to decrease production costs, increase yields and to optimize efficiencies. ...

Semiconductor nanocrystal quantum dots (NQDs) have long demonstrated potential in a broad range of optoelectronics applications such as lasers, light-emitting diodes (LEDs), photovoltaic solar cells, photo- and biosensors, ...

Recent advances in the synthesis and quality of 2D materials within the last decade, such as graphene and MoS₂, have led to a new generation of solid state nanopore DNA sequencing devices with improved sub-nanometer spatial ...

In this dissertation, key aspects of the surface chemistry associated with gas phase deposition and etching are discussed. Atomic layer deposition (ALD) is a gas-phase deposition technique primarily known for its superior ...

Atomic layer deposition (ALD) and atomic layer etching (ALE) will be the key techniques for sub10 nm node technology. Establishing a mechanistic understanding of the underlying surface chemistry is crucial for the ...

This dissertation focuses on the applications of atomic layer deposition (ALD) to high mobility III-V semiconductor devices. The first study is an in situ ALD-based interface passivation technique using ALD diethylzinc ...