Now showing items 1-6 of 6
Novel Sensing Approaches towards Ultimate MEMS Sensors
Within the past few decades, several micro and nano-electromechanical (MEMS and NEMS) accelerometers, magnetometers and vibration sensors utilizing various actuation and sensing mechanisms have been developed and demonstrated. ...
MEMS-CMOS Heterogenous Mixed Signal Circuit Design
Various mixed-signal circuits form an integral part of modern electronic systems, whether portable or bench-top in size. Power converters, data converters and communication circuits are the three major categories of ...
Observations while attempting to fabricate a micro-electron detection system
Over the past 20 years, Micro-Electromechanical Systems (MEMS) influence typical daily activities and have become integrated in everyday life. Fabrication of such devices on the micro- and nano-scale is made possible with ...
A MEMS-Assisted Dual-Resonator Temperature-to-Digital Converter
Many applications demand precision oscillators, which are usually generated through employing resonators with high quality factor (Q). Quartz and MicroElectroMechanical systems (MEMS) are the most common precision resonators ...
Resonant MEMS Piezoelectric Balances and Strain-Gauges
Microelectromechanical (MEMS) resonators can be used as high sensitivity frequency output nano-balances to detect small masses of biomolecules at low concentrations for biosensing applications. For this reason, the ...
Nano-Electromechanical Active Resonant Devices
Over the last three decades, various functionalities ranging from frequency selection and timing to sensing and actuation have been successfully demonstrated for microscale and nanoscale electromechanical systems. Although ...