Now showing items 1-2 of 2
Observations while attempting to fabricate a micro-electron detection system
Over the past 20 years, Micro-Electromechanical Systems (MEMS) influence typical daily activities and have become integrated in everyday life. Fabrication of such devices on the micro- and nano-scale is made possible with ...
A MEMS-Assisted Dual-Resonator Temperature-to-Digital Converter
Many applications demand precision oscillators, which are usually generated through employing resonators with high quality factor (Q). Quartz and MicroElectroMechanical systems (MEMS) are the most common precision resonators ...