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dc.contributor.advisorOverzet, Lawrence
dc.contributor.advisorGoeckner, Matthew
dc.creatorHernandez, Keith Valdez
dc.date.accessioned2017-03-31T21:14:15Z
dc.date.available2017-03-31T21:14:15Z
dc.date.created2016-12
dc.date.issued2016-12
dc.date.submittedDecember 2016
dc.identifier.urihttp://hdl.handle.net/10735.1/5355
dc.description.abstractOver the past 20 years, Micro-Electromechanical Systems (MEMS) influence typical daily activities and have become integrated in everyday life. Fabrication of such devices on the micro- and nano-scale is made possible with plasma technology. In this thesis, an attempt to fabricate a micro-scale Electron Detection System (mEDS) is discussed. This device, in theory, would advance fundamental understanding of what happens on a surface of a semiconductor in the presence of an electric field. The mEDS would bias potentials so that an ion-surface interaction would occur in the presence of an electric field while not affecting the ion’s energy appreciably. The following work reports on the observations of different steps during the fabrication of the mEDS. More specifically the chemical reactions and compressive stress during the wet etch (Chapter 3), high leakage current through the insulator layers (Chapter 4) and lithography interference issues (Chapter 5). Some issues were resolved while others are still being corrected at the time of this writing.
dc.format.mimetypeapplication/pdf
dc.language.isoen
dc.rightsCopyright ©2016 is held by the author. Digital access to this material is made possible by the Eugene McDermott Library. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
dc.subjectMicroelectromechanical systems
dc.subjectElectrons—Emission
dc.subjectHydrofluoric acid
dc.subjectChemical reactions
dc.subjectMechanical chemistry
dc.subjectPhotolithography
dc.titleObservations while attempting to fabricate a micro-electron detection system
dc.typeThesis
dc.date.updated2017-03-31T21:14:15Z
dc.type.materialtext
thesis.degree.grantorUniversity of Texas at Dallas
thesis.degree.departmentElectrical Engineering
thesis.degree.levelMasters
thesis.degree.nameMSEE


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