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dc.contributor.authorMattson, Eric C.en_US
dc.contributor.authorMichalak, D. J.en_US
dc.contributor.authorVeyan, Jean Francoisen_US
dc.contributor.authorChabal, Yves J.en_US
dc.date.accessioned2018-08-24T21:11:19Z
dc.date.available2018-08-24T21:11:19Z
dc.date.created2016-10-19
dc.identifier.issn0021-9606en_US
dc.identifier.urihttp://hdl.handle.net/10735.1/6023
dc.description.abstractCobalt-iron-boron (CoFeB) thin films are the industry standard for ferromagnetic layers in magnetic tunnel junction devices and are closely related to the relevant surfaces of CoFe-based catalysts. Identifying and understanding the composition of their surfaces under relevant processing conditions is therefore critical. Here we report fundamental studies on the interaction of nitrogen plasma with CoFeB surfaces using infrared spectroscopy, x-ray photoemission spectroscopy, and low energy ion scattering. We find that, upon exposure to nitrogen plasma, clean CoFeB surfaces spontaneously reorganize to form an overlayer comprised of Fe2N3 and BN, with the Co atoms moved well below the surface through a chemically driven process. Subsequent annealing to 400 °C removes nitrogen, resulting in a Fe-rich termination of the surface region. © 2016 Author(s).en_US
dc.description.sponsorshipNational Science Foundation (Grant No. CHE1300180)en_US
dc.language.isoenen_US
dc.publisherAmerican Institute of Physics Incen_US
dc.relation.urihttp://dx.doi.org/10.1063/1.4964679
dc.relation.urihttp://dx.doi.org/10.1063/1.4964679en_US
dc.rights©2016 The Authors.en_US
dc.subjectCobalten_US
dc.subjectCobalt compoundsen_US
dc.subjectInfrared spectroscopyen_US
dc.subjectNitrogenen_US
dc.subjectPhotoelectron spectroscopyen_US
dc.subjectCrystalsen_US
dc.subjectFerromagnetismen_US
dc.subjectNitrogen plasmasen_US
dc.titleCobalt and Iron Segregation and Nitride Formation from Nitrogen Plasma Treatment of CoFeB Surfacesen_US
dc.type.genrearticleen_US
dc.description.departmentErik Jonsson School of Engineering and Computer Scienceen_US
dc.identifier.bibliographicCitationMattson, E. C., D. J. Michalak, J. F. Veyan, and Y. J. Chabal. 2016. "Cobalt and iron segregation and nitride formation from nitrogen plasma treatment of CoFeB surfaces." Journal of Chemical Physics 146(5), doi:10.1063/1.4964679en_US
dc.source.journalJournal of Chemical Physicsen_US
dc.identifier.volume146en_US
dc.identifier.issue5en_US
dc.contributor.utdAuthorMattson, Eric C.en_US
dc.contributor.utdAuthorVeyan, Jean Francoisen_US
dc.contributor.utdAuthorChabal, Yves J.en_US
dc.contributor.ORCID0000-0002-3743-5521 (Veyan, JF)en_US
dc.contributor.ORCID0000-0002-6435-0347 (Chabal, YJ)en_US


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