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Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances
(IEEE-Institute of Electrical and Electronics Engineers Inc, 2018-10-09)
Thin film piezoelectric-on-silicon (TPoS) elliptical resonators are presented in this paper. The micro-resonators are composed of two rectangular resonant plates vibrating out-of-phase at the first length-extensional mode, ...