Sensitivity of High-k Encapsulated MoS₂ Transistors to I-V Measurement Execution Time
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Institute of Electrical and Electronics Engineers Inc.
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Abstract
High-k encapsulated MoS₂ field-effect-transistors were fabricated and electrically characterized. Comparison between HfO₂ and Al₂O₃ encapsulated MoS₂ FETs and their I-V response to execution time are shown. Changes in gate voltage step and integration time demonstrate that electrical characterization parameters can significantly impact device parameters such as the subthreshold swing and the threshold voltage. © 2018 IEEE.
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Keywords
Electric fields, Hafnium compounds, Semiconductors, Microelectronics, Molybdenum compounds, Electromotive force, Field-effect transistors
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©2018 IEEE