• Login
    View Item 
    •   Treasures Home
    • Academic Schools and Programs
    • Erik Jonsson School of Engineering and Computer Science
    • JECS Faculty Research
    • Kim, Jiyoung
    • View Item
    •   Treasures Home
    • Academic Schools and Programs
    • Erik Jonsson School of Engineering and Computer Science
    • JECS Faculty Research
    • Kim, Jiyoung
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Ferroelectric Hf₀․₅Zr₀․₅O₂ Thin Films: A Review of Recent Advances

    Thumbnail
    View/Open
    Link to Article (192.7Kb)
    Date
    2018-09-28
    Author
    Kim, Si Joon
    Mohan, Jaidah
    Summerfelt, Scott R.
    Kim, Jiyoung
    Metadata
    Show full item record
    Abstract
    Abstract
    Ferroelectricity in HfO₂-based materials, especially Hf₀․₅Zr₀․₅O₂ (HZO), is today one of the most attractive topics because of its wide range of applications in ferroelectric random-access memory, ferroelectric field-effect transistors, ferroelectric tunneling junctions, steep-slope devices, and synaptic devices. The main reason for this increasing interest is that, when compared with conventional ferroelectric materials, HZO is compatible with complementary metal-oxide-semiconductor flow [even back-end of the line thermal budget] and can exhibit robust ferroelectricity even at extremely thin (<10nm) thicknesses. In this report, recent advances in the ferroelectric properties of HZO thin films since the first report in 2011, including doping effects, mechanical stress effects, interface effects, and ferroelectric film thickness effects, are comprehensively reviewed.
    Description
    Due to copyright restrictions and/or publisher's policy full text access from Treasures at UT Dallas is limited to current UTD affiliates (use the provided Link to Article).
    URI
    http://dx.doi.org/10.1007/s11837-018-3140-5
    https://hdl.handle.net/10735.1/8655
    Collections
    • Kim, Jiyoung

    DSpace software copyright © 2002-2016  DuraSpace
    Contact Us | Send Feedback
    Theme by 
    Atmire NV
     

     

    Browse

    All of TreasuresCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

    My Account

    Login

    DSpace software copyright © 2002-2016  DuraSpace
    Contact Us | Send Feedback
    Theme by 
    Atmire NV