Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide

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dc.contributor.ORCID0000-0003-2781-5149 (Kim, J)
dc.contributor.ORCID0000-0002-6488-5915 (Kim, HS)
dc.contributor.VIAF70133685 (Kim, J)
dc.contributor.authorKim, Harrison Sejoon
dc.contributor.authorLee, Joy S.
dc.contributor.authorKim, S. J.
dc.contributor.authorLee, Jaebeom
dc.contributor.authorLucero, Antonio T.
dc.contributor.authorSung, M. M.
dc.contributor.authorKim, Jiyoung
dc.contributor.utdAuthorKim, Harrison Sejoon
dc.contributor.utdAuthorLee, Joy S.
dc.contributor.utdAuthorLee, Jaebeom
dc.contributor.utdAuthorLucero, Antonio T.
dc.contributor.utdAuthorKim, Jiyoung
dc.date.accessioned2020-03-18T17:00:09Z
dc.date.available2020-03-18T17:00:09Z
dc.date.issued2019-05-07
dc.descriptionDue to copyright restrictions and/or publisher's policy full text access from Treasures at UT Dallas is limited to current UTD affiliates (use the provided Link to Article).
dc.description.abstractThough the synthesis of libraries of multicomponent metal oxide systems is prevalent using the combinatorial approach, the combinatorial approach has been rarely realized in studying simple metal oxides, especially applied to the atomic layer deposition (ALD) technique. In this literature, a novel combinatorial approach technique is utilized within an ALD grown simple metal oxide to synthesize a "spatially addressable combinatorial library". The two key factors in gradients were defined during the ALD process: (1) the process temperature and (2) a nonuniform flow of pulsed gases inside a cross-flow reactor. To validate the feasibility of our novel combinatorial approach, a case study of zinc oxide (ZnO), a simple metal oxide whose properties are well-known, is performed. Because of the induced gradient, the ZnO (002) crystallite size was found to gradually vary across a 100 mm wafer (10-20 nm) with a corresponding increase in the normalized Raman E 2 /A 1 peak intensity ratio. The findings agree well with the visible grain size observed from scanning electron microscope. The novel combinatorial approach provides a means of systematical interpretation of the combined effect of the two gradients, especially in the analysis of the microstructure of ZnO crystals. Moreover, the combinatorial library reveals that the process temperature, rather than the crystal size, plays the most significant role in determining the electrical conductivity of ZnO. © 2019 American Chemical Society.
dc.description.departmentErik Jonsson School of Engineering and Computer Science
dc.description.sponsorship"This work was supported by the Creative Materials Discovery Program on Creative Multilevel Research Center (2015M3D1A1068061) through the National Research Foundation (NRF) of Korea funded by the Ministry of Science, ICT & Future Planning.
dc.identifier.bibliographicCitationKim, H. S., J. S. Lee, S. J. Kim, J. Lee, et al. 2019. "Realization of spatially addressable library by a novel combinatorial approach on atomic layer deposition: A case study of zinc oxide." ACS Combinatorial Science 21(6): 445-455, doi: 10.1021/acscombsci.9b00007
dc.identifier.issn2156-8952
dc.identifier.issue6
dc.identifier.urihttp://dx.doi.org/10.1021/acscombsci.9b00007
dc.identifier.urihttps://hdl.handle.net/10735.1/7404
dc.identifier.volume21
dc.language.isoen
dc.publisherAmerican Chemical Society
dc.rights©2019 American Chemical Society
dc.source.journalACS Combinatorial Science
dc.subjectAtomic layer deposition
dc.subjectMaterials science, Combinatorial
dc.subjectZinc oxide
dc.subjectElectric conductivity
dc.titleRealization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide
dc.type.genrearticle

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