Top-Down Fabrication of High-Uniformity Nanodiamonds by Self-Assembled Block Copolymer Masks

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dc.contributor.ORCID0000-0003-2781-5149 (Kim, J)
dc.contributor.VIAF70133685 (Kim, J)
dc.contributor.authorBersin, E.
dc.contributor.authorCotlet, M.
dc.contributor.authorDoerk, G.
dc.contributor.authorLienhard, B.
dc.contributor.authorZheng, J
dc.contributor.authorKim, Harrison Sejoon
dc.contributor.authorByun, Young-Chui
dc.contributor.authorNam, C. -Y.
dc.contributor.authorKim, Jiyoung
dc.contributor.authorBlack, C. T.
dc.contributor.authorEnglund, D.
dc.contributor.utdAuthorKim, Harrison Sejoon
dc.contributor.utdAuthorByun, Young-Chui
dc.contributor.utdAuthorKim, Jiyoung
dc.date.accessioned2020-02-03T19:36:29Z
dc.date.available2020-02-03T19:36:29Z
dc.date.created2019-05-06
dc.description.abstractNanodiamonds hosting colour centres are a promising material platform for various quantum technologies. The fabrication of non-aggregated and uniformly-sized nanodiamonds with systematic integration of single quantum emitters has so far been lacking. Here, we present a top-down fabrication method to produce 30.0 ± 5.4 nm uniformly-sized single-crystal nanodiamonds by block copolymer self-assembled nanomask patterning together with directional and isotropic reactive ion etching. We show detected emission from bright single nitrogen vacancy centres hosted in the fabricated nanodiamonds. The lithographically precise patterning of large areas of diamond by self-assembled masks and their release into uniformly sized nanodiamonds open up new possibilities for quantum information processing and sensing. ©2019, The Author(s).en_US
dc.description.departmentErik Jonsson School of Engineering and Computer Scienceen_US
dc.description.sponsorshipU.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. DE-SC0012704.en_US
dc.identifier.bibliographicCitationZheng, J., B. Lienhard, G. Doerk, M. Cotlet, et al. 2019. "Top-down fabrication of high-uniformity nanodiamonds by self-assembled block copolymer masks." Scientific Reports 9(1) art. 6914, doi: 10.1038/s41598-019-43304-5
dc.identifier.issn2045-2322
dc.identifier.issue1
dc.identifier.urihttp://dx.doi.org/10.1038/s41598-019-43304-5
dc.identifier.urihttps://hdl.handle.net/10735.1/7219
dc.identifier.volume9en_US
dc.language.isoenen_US
dc.publisherNature Publishing Group
dc.rightsCC BY 4.0 (Attribution)en_US
dc.rights©2019 The Authorsen_US
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/en_US
dc.source.journalScientific Reportsen_US
dc.subjectNanoparticles
dc.subjectQuantum optics
dc.subjectPhotons
dc.subjectNanodiamonds
dc.titleTop-Down Fabrication of High-Uniformity Nanodiamonds by Self-Assembled Block Copolymer Masks
dc.type.genrearticleen_US

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