Hydroquinone-ZnO Nano-Laminate Deposited by Molecular-Atomic Layer Deposition



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American Institute of Physics Inc



In this study, we have deposited organic-inorganic hybrid semiconducting hydroquinone (HQ)/zinc oxide (ZnO) superlattices using molecular-atomic layer deposition, which enables accurate control of film thickness, excellent uniformity, and sharp interfaces at a low deposition temperature (150 °C). Self-limiting growth of organic layers is observed for the HQ precursor on ZnO surface. Nano-laminates were prepared by varying the number of HQ to ZnO cycles in order to investigate the physical and electrical effects of different HQ to ZnO ratios. It is indicated that the addition of HQ layer results in enhanced mobility and reduced carrier concentration. The highest Hall mobility of approximately 2.3 cm²/V·s and the lowest n-type carrier concentration of approximately 1.0 × 10¹⁸/cm³ were achieved with the organic-inorganic superlattice deposited with a ratio of 10 ZnO cycles to 1 HQ cycle. This study offers an approach to tune the electrical transport characteristics of ALD ZnO matrix thin films using an organic dopant. Moreover, with organic embedment, this nano-laminate material may be useful for flexible electronics.



Carrier mobility, Flexible electronics, Hall mobility, Laminates, Phenols, Superlattices, Zinc oxide, Organic-inorganic hybrid materials, Atomic layer deposition


"This research was financially supported by Kookmin University (through UTD-KMU In-FUSION program), Texas Research Incentive Program (TRIP), and MKE-COSAR-KETI through Korea-U.S. collaboration R/D program."


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