Q Control of an Active AFM Cantilever with Differential Sensing Configuration

dc.contributor.ORCID0000-0001-5349-6319 (Coskun, MB)
dc.contributor.ORCID0000-0002-5219-5781 (Fowler, AG)
dc.contributor.ORCID0000-0001-7127-5026 (Maroufi, M)
dc.contributor.ORCID0000-0002-1225-4126 (Moheimani, SOR)
dc.contributor.VIAF298210 (Moheimani, SOR)
dc.contributor.authorCoskun, M. Bulut
dc.contributor.authorAlemansour, Hamed
dc.contributor.authorFowler, Anthony G.
dc.contributor.authorMaroufi, Mohammad
dc.contributor.authorMoheimani, S. O. Reza
dc.contributor.utdAuthorCoskun, M. Bulut
dc.contributor.utdAuthorAlemansour, Hamed
dc.contributor.utdAuthorFowler, Anthony G.
dc.contributor.utdAuthorMaroufi, Mohammad
dc.contributor.utdAuthorMoheimani, S. O. Reza
dc.descriptionFull text access from Treasures at UT Dallas is restricted to current UTD affiliates.
dc.description.abstractMicrocantilevers featuring separate built-in actuation and displacement sensing capabilities allow effective and simple implementation of control methods, opening a pathway to achieving higher scan speeds in tapping-mode atomic force microscopy. Such active cantilevers are a significant milestone to eventually obtain video-rate on-chip atomic force microscopes (AFMs) that can even surpass the functionality and imaging speed of their macroscale counterparts at a significantly lower cost. In this brief, we present an active AFM cantilever with an on-chip actuator and two built-in displacement sensors, designed to be integrated into on-chip AFMs. The common feedthrough problem present in this type of architecture is addressed by a differential sensing configuration, and the revealed dynamics are used for the system identification. A positive position feedback controller is designed to actively tailor the Q factor of the cantilever. The imaging performance of the microcantilever with and without Q control is compared by attenuating the cantilever's Q factor from 177 to 15 using the feedback loop. A common artifact in high-speed scans, the parachuting effect, is mitigated, rendering higher imaging speeds achievable.
dc.description.departmentErik Jonsson School of Engineering and Computer Science
dc.identifier.bibliographicCitationCoskun, M. B., H. Alemansour, A. G. Fowler, M. Maroufi, et al. 2018. "Q control of an active AFM cantilever with differential sensing configuration." IEEE Transactions on Control Systems Technology, doi:10.1109/TCST.2018.2850338
dc.identifier.volumeEarly Access
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.rights©2018 IEEE
dc.source.journalIEEE Transactions on Control Systems Technology
dc.subjectAtomic force microscopy
dc.subjectSystems on a chip
dc.subjectChemical detectors
dc.titleQ Control of an Active AFM Cantilever with Differential Sensing Configuration


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