An Adjustable-Stiffness MEMS Force Sensor: Design, Characterization, and Control

dc.contributor.authorMaroufi, Mohammad
dc.contributor.authorAlemansour, Hamed
dc.contributor.authorBulut Coskun, M.
dc.contributor.authorReza Moheimani, S. O.
dc.contributor.utdAuthorMaroufi, Mohammad
dc.contributor.utdAuthorAlemansour, Hamed
dc.contributor.utdAuthorBulut Coskun, M.
dc.contributor.utdAuthorReza Moheimani, S. O.
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dc.description.abstractThis paper presents a novel one-degree-of-freedom microelectromechanical systems (MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation mechanisms, enabling open- and closed-loop modalities. An active compliance mechanism is incorporated to render the device more conducive to characterization of soft samples. When operated in closed loop, the adjustable stiffness enables the sensor to attain a larger dynamic range and minimize the nonlinearities originating from flexures. Analytical models are employed to design and calibrate the sensor. In open loop, the sensing resolution of 23.3 nN within a bandwidth of 2.35 kHz and a full-scale range of ± 42.6 µ N are experimentally obtained. The resolution is enhanced to 9.3 nN by employing an active compliance mechanism. When operated in closed loop, a resolution of 12.9 nN is achieved within a dynamic range of 71.2 dB and a sensing bandwidth of 3.6 kHz is demonstrated. The sensor performance is tested by obtaining the stiffness of an atomic force microscope probe and measuring the force produced by a self-actuated piezoelectric microcantilever.
dc.description.departmentErik Jonsson School of Engineering and Computer Science
dc.identifier.bibliographicCitationMaroufi, M., H. Alemansour, M. Bulut Coskun, and S. O. Reza Moheimani. 2018. "An adjustable-stiffness MEMS force sensor: Design, characterization, and control." Mechatronics 56: 198-210, doi:10.1016/j.mechatronics.2018.05.007
dc.publisherElsevier Ltd. All Rights Reserved.
dc.rights©2018 Elsevier Ltd
dc.subjectTactile sensors
dc.subjectMicroelectromechanical systems
dc.subjectAtomic force microscopy
dc.subjectDegree of freedom
dc.subjectElectromechanical devices
dc.titleAn Adjustable-Stiffness MEMS Force Sensor: Design, Characterization, and Control


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