UV-Ozone Functionalization of 2D Materials

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dc.contributor.ORCID0000-0001-5566-4806 (Wallace, RM)
dc.contributor.authorMcDonnell, Stephen J.
dc.contributor.authorWallace, Robert M.
dc.contributor.utdAuthorWallace, Robert M.
dc.date.accessioned2020-06-15T21:19:24Z
dc.date.available2020-06-15T21:19:24Z
dc.date.issued2018-10-04
dc.descriptionDue to copyright restrictions and/or publisher's policy full text access from Treasures at UT Dallas is limited to current UTD affiliates (use the provided Link to Article).
dc.description.abstractIntegrating two-dimensional (2D) materials into the current nanoelectronic process requires control over the deposition of gate oxides onto these materials. Atomic layer deposition (ALD) relies on surface dangling bonds that are scarce for 2D materials. This review summarizes the advances made in understanding and controlling the nucleation of ALD oxides on these materials. As an example, we focus on ozone-based processes including UV-ozone pretreatments, which we have found to effectively functionalize the surface of molybdenum disulfide. Furthermore, we discuss the advantages and limitations of various functionalization or seeding techniques, such as limits in scalability or damage to the 2D materials.
dc.description.departmentErik Jonsson School of Engineering and Computer Science
dc.identifier.bibliographicCitationMcDonnell, Stephen J., and Robert M. Wallace. 2019. "UV-Ozone Functionalization of 2D Materials." Journal of The Minerals, Metals & Materials Society 71(1): 224-237, doi: 10.1007/s11837-018-3156-x
dc.identifier.issn1047-4838
dc.identifier.issue1
dc.identifier.urihttp://dx.doi.org/10.1007/s11837-018-3156-x
dc.identifier.urihttps://hdl.handle.net/10735.1/8669
dc.identifier.volume71
dc.language.isoen
dc.publisherSpringer
dc.rights©2018 Springer Nature Switzerland AG
dc.source.journalJournal of The Minerals, Metals & Materials Society
dc.subjectAtomic layer deposition
dc.subjectTransistors--Molybdenum disulfide
dc.subjectMolybdenum disulfide
dc.subjectGraphene
dc.subjectAluminum oxide
dc.subjectMaterials science
dc.subjectMetallurgy
dc.subjectMineralogy
dc.titleUV-Ozone Functionalization of 2D Materials
dc.type.genrearticle

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