Using Photoelectron Spectroscopy in the Integration of 2D Materials for Advanced Devices




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Elsevier Science B.V.


The first commercial applications of two dimensional (2D) layered materials such as graphite and MoS₂ used their lubricant properties. Following the discovery of graphene and its potential applications in various fields, increased interest has focused on other 2D materials such as transition metal dichalcogenides (TMDs) offering tremendous opportunities in advanced optoelectronics and ultra-thin electronics. Using X-ray photoelectron spectroscopy (XPS), this review addresses the facets of the device fabrication and integration and correlates at the nanometer scale the device behavior to the TMD properties. Understanding and solving the integration challenges will make the TMD technology jump from the current phase of experimental proof of concept and laboratory research to a relevant prototype demonstration and production phase.


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X-ray photoelectron spectroscopy, Two-dimensional materials, Atomic layer deposition, Materials, Molybdenum(IV) Sulfide, Thin-films, Dielectrics, Oxidation, Graphene, Spectroscopy

National Science Foundation (NSF) award no. 1407765


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